Featured Articles

This paper studies the operational logic in an inter-bay automated material handling system (AMHS) in semiconductor wafer fabrication. This system consists of stockers located in a two-floor layout. Automated moving devices transfer lots between stockers within the same floor (intra-floor lot transfer) or between different floors (inter-floor lot transfer).

This paper identifies a method for classifying a fab model by the level of capacity detail, the level of AMHS detail, or the level of capacity/AMHS detail. Within the capacity/ AMHS modeling level, our method further differentiates between detailed integrated capacity/AMHS models and abstract coupled capacity/AMHS models.

The study seeks to design a grid-connected DG system that is capable of providing the necessary electricity for wafer fabs. Simulation-based optimization algorithm was applied to determine the equipment type and capacity aiming to minimize the DG lifecycle cost.

This paper proposes a queueing-based analytical model useful in the design of closed-loop conveyor-based automated material handling system (AMHS), which has been identified as an effective material handling alternative in next-generation semiconductor wafer fabrication facilities.

This article aims to integrate the indoor positioning technology with a specialized user application, which allows the users to define what kinds of data should be collected and how the raw data should be transformed.